The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
May. 06, 2019
Applicant:
Toshiba Memory Corporation, Tokyo, JP;
Inventors:
Mitsuko Shimizu, Tokyo, JP;
Takashi Sato, Kanagawa, JP;
Akiko Mimotogi, Kanagawa, JP;
Akiko Yamada, Tokyo, JP;
Takeshi Suto, Kanagawa, JP;
Assignee:
Toshiba Memory Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01L 21/027 (2006.01); G03F 9/00 (2006.01); C09K 11/56 (2006.01); C09K 11/77 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7042 (2013.01); C09K 11/565 (2013.01); C09K 11/7734 (2013.01); G03F 7/0002 (2013.01); H01L 21/0271 (2013.01);
Abstract
According to one embodiment, an imprint method is provided. In the imprint method, a template including a mechanoluminescent material is brought into contact with a resist on a substrate. The posture of the template is adjusted on the basis of the intensity of mechanoluminescence from the template. Light is emitted to the resist to harden the resist. The template is separated from the resist.