The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Sep. 29, 2017
Nikon Corporation, Tokyo, JP;
Yasuo Aoki, Zushi, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A movable body apparatus is provided with: a substrate holder which holds a substrate and which can move in the X- and Y-axis directions; a Y coarse movement stage which can move in the Y-axis direction; a first measurement system which acquires position information on substrate holder by means of heads provided on substrate holder and a scale provided on Y coarse movement stage; a second measurement system which acquires position information on Y coarse movement stage by means of heads provided on Y coarse movement stage and a scale; and a control system which controls the position of substrate holder based on position information acquired by first and second measurement systems. The first measurement system irradiates a measurement beam while moving heads in X-axis direction with respect to the scale, and second measurement system irradiates a measurement beam while moving heads in Y-axis direction with respect to the scale.