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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10782613 B1

PDFFull Text
Date of Patent:
Sep. 22, 2020

Filed:

Apr. 19, 2018

Polymerizable self-assembled monolayers for use in atomic layer deposition

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Rudy J. Wojtecki, San Jose, CA (US);

Noah F. Fine Nathel, Arlington, MA (US);

Ekmini A. De Silva, Slingerlands, NY (US);

Assignee:

International Business Machines Corporation, Armonk, NY (US);

Attorney:

Michael R. Roberts

Primary Examiner:

Kathleen Duda

Int. Cl.
CPC ...
G03F 7/20 (2006.01); C23C 16/40 (2006.01); C08G 79/04 (2006.01); G03F 7/16 (2006.01); G03F 7/38 (2006.01); C09D 185/02 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01); C23C 16/04 (2006.01);
U.S. Cl.
CPC ...
G03F 7/20 (2013.01); C08G 79/04 (2013.01); C09D 185/02 (2013.01); C23C 16/042 (2013.01); C23C 16/405 (2013.01); C23C 16/45525 (2013.01); G03F 7/16 (2013.01); G03F 7/2004 (2013.01); G03F 7/38 (2013.01); H01L 21/0228 (2013.01); H01L 21/02181 (2013.01); H01L 21/02186 (2013.01); H01L 21/02189 (2013.01);
Abstract

Self-assembled monolayers (SAMs) were selectively prepared on portions of a substrate surface utilizing compounds comprising a hydrogen-bonding group and polymerizable diacetylene group. The SAMs were photopolymerized using ultraviolet light. The pre-polymerized and polymerized SAMs were more effective barriers against metal deposition in an atomic layer deposition process compared to similar compounds lacking these functional groups.

Find Patent Forward Citations

Wojtecki, Rudy. (2020). Polymerizable self-assembled monolayers for use in atomic layer deposition (U.S. Patent No. 10782613). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10782613

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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