The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Mar. 29, 2018
Applicant:
Reno Technologies, Inc., Wilmington, DE (US);
Inventors:
Daniel T. Mudd, Reno, NV (US);
Patti J. Mudd, Reno, NV (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 5/06 (2006.01); G01F 1/36 (2006.01); F16K 37/00 (2006.01); F16K 47/08 (2006.01); F16K 27/00 (2006.01); G01F 1/88 (2006.01); G01F 15/00 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
G01F 1/36 (2013.01); F16K 27/003 (2013.01); F16K 37/005 (2013.01); F16K 47/08 (2013.01); G01F 1/88 (2013.01); G01F 15/002 (2013.01); G01F 15/005 (2013.01); G05D 7/0635 (2013.01);
Abstract
In one embodiment, a system for controlling the delivery of process gas has a first mass flow device and a pressure transducer. The first mass flow device has a substrate block with an inlet conduit and an outlet conduit. A proportional valve having a first valve body is mounted to the substrate block and fluidly connected to the inlet conduit. A characterized restrictor is fluidly connected to the proportional valve and the outlet conduit.