The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
Jun. 03, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Mehmet Tugrul Samir, Mountain View, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/14 (2006.01); C30B 25/10 (2006.01); C23C 16/46 (2006.01); C23C 16/455 (2006.01); C30B 25/12 (2006.01);
U.S. Cl.
CPC ...
C30B 25/14 (2013.01); C23C 16/4558 (2013.01); C23C 16/46 (2013.01); C30B 25/105 (2013.01); C30B 25/12 (2013.01);
Abstract
Embodiments of the present disclosure provide a processing chamber with a top, a bottom, and a sidewall coupled together to define a volume, a gas distributor disposed around the sidewall, a substrate support disposed in the enclosure, the substrate support having a central exhaust opening having a channel and a rotary actuator disposed along a longitudinal axis thereof, and a plurality of substrate pockets distributed around the central exhaust opening, and an energy source coupled to the bottom.