The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2020
Filed:
May. 24, 2019
Applicants:
SK Innovation Co., Ltd., Seoul, KR;
Sk-materials Co., Ltd., Yeongju-si, KR;
Inventors:
Cheol Woo Kim, Daejeon, KR;
Je Ho Lee, Daejeon, KR;
Jin Su Ham, Daejeon, KR;
Jae Hoon Kwak, Yeongju-si, KR;
Jong Ho Lee, Yeongju-si, KR;
Assignees:
SK Innovation Co., Ltd., Seoul, KR;
SK-Materials Co., Ltd., Yeongju-si, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3213 (2006.01); H01L 21/311 (2006.01); H01L 21/306 (2006.01); H01L 21/04 (2006.01); C23F 1/16 (2006.01); C23F 1/14 (2006.01); C23F 1/00 (2006.01); C09K 13/06 (2006.01); C07F 9/6596 (2006.01); C07F 9/6561 (2006.01); C07F 9/53 (2006.01); C07F 9/50 (2006.01); C07F 9/28 (2006.01); C07F 7/18 (2006.01); C07F 7/08 (2006.01);
U.S. Cl.
CPC ...
C09K 13/06 (2013.01); C07F 7/0834 (2013.01); C07F 9/28 (2013.01); C23F 1/00 (2013.01); C23F 1/14 (2013.01); C23F 1/16 (2013.01); H01L 21/042 (2013.01); H01L 21/30604 (2013.01); H01L 21/311 (2013.01); H01L 21/31111 (2013.01); H01L 21/32134 (2013.01);
Abstract
An etchant composition includes phosphoric acid and a silane compound represented by the following Chemical Formula 1: wherein A is an n-valent radical, L is C-Chydrocarbylene, Rto Rare independently hydrogen, hydroxy, hydrocarbyl, or alkoxy, in which Rto Rexist respectively or are connected to each other by a heteroelement, and n is an integer of 2 to 5.