logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10781371 B1

PDFFull Text
Date of Patent:
Sep. 22, 2020

Filed:

May. 24, 2019

Etchant composition and silane compound

Applicants:

SK Innovation Co., Ltd., Seoul, KR;

Sk-materials Co., Ltd., Yeongju-si, KR;

Inventors:

Cheol Woo Kim, Daejeon, KR;

Je Ho Lee, Daejeon, KR;

Jin Su Ham, Daejeon, KR;

Jae Hoon Kwak, Yeongju-si, KR;

Jong Ho Lee, Yeongju-si, KR;

Assignees:

SK Innovation Co., Ltd., Seoul, KR;

SK-Materials Co., Ltd., Yeongju-si, KR;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Stephanie P Duclair

Int. Cl.
CPC ...
H01L 21/3213 (2006.01); H01L 21/311 (2006.01); H01L 21/306 (2006.01); H01L 21/04 (2006.01); C23F 1/16 (2006.01); C23F 1/14 (2006.01); C23F 1/00 (2006.01); C09K 13/06 (2006.01); C07F 9/6596 (2006.01); C07F 9/6561 (2006.01); C07F 9/53 (2006.01); C07F 9/50 (2006.01); C07F 9/28 (2006.01); C07F 7/18 (2006.01); C07F 7/08 (2006.01);
U.S. Cl.
CPC ...
C09K 13/06 (2013.01); C07F 7/0834 (2013.01); C07F 9/28 (2013.01); C23F 1/00 (2013.01); C23F 1/14 (2013.01); C23F 1/16 (2013.01); H01L 21/042 (2013.01); H01L 21/30604 (2013.01); H01L 21/311 (2013.01); H01L 21/31111 (2013.01); H01L 21/32134 (2013.01);
Abstract

An etchant composition includes phosphoric acid and a silane compound represented by the following Chemical Formula 1: wherein A is an n-valent radical, L is C-Chydrocarbylene, Rto Rare independently hydrogen, hydroxy, hydrocarbyl, or alkoxy, in which Rto Rexist respectively or are connected to each other by a heteroelement, and n is an integer of 2 to 5.

Find Patent Forward Citations

Kim, Cheol. (2020). Etchant composition and silane compound (U.S. Patent No. 10781371). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10781371

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…