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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10781130 B1

PDFFull Text
Date of Patent:
Sep. 22, 2020

Filed:

Feb. 27, 2017

Heat treatment apparatus

Applicant:

Shin-etsu Chemical Co., Ltd., Tokyo, JP;

Inventors:

Kazuya Uchida, Ibaraki-ken, JP;

Takashi Koshigai, Gunma-ken, JP;

Assignee:

SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;

Attorney:

Greenblum & Bernstein, P.L.C.

Primary Examiner:

Phuong T Nguyen

Int. Cl.
CPC ...
C03B 32/02 (2006.01); C03B 37/014 (2006.01); C03B 37/10 (2006.01); F27B 1/00 (2006.01); F27B 1/12 (2006.01); F27B 9/14 (2006.01); F27D 11/02 (2006.01);
U.S. Cl.
CPC ...
C03B 32/02 (2013.01); C03B 37/0146 (2013.01); C03B 37/01446 (2013.01); C03B 37/10 (2013.01); F27B 1/005 (2013.01); F27B 1/12 (2013.01); F27B 9/142 (2013.01); F27D 11/02 (2013.01); C03B 2205/10 (2013.01); C03B 2205/80 (2013.01);
Abstract

A heat treatment apparatus includes: a furnace core tube made of silica glass; a heater provided adjacent to the furnace core tube, the heater heating a heating region; and a moving mechanism supporting a porous glass base material and relatively moving the porous glass base material with respect to the heater in the furnace core tube in a state where the heating region is heated by the heater to make the porous glass base material pass through the heating region. The heat treatment apparatus includes a thin-walled part provided in a region adjacent to a portion located in the heating region in the furnace core tube, the thin-walled part having a thickness of glass less than that of the portion located in the heating region.

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