The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Feb. 11, 2020
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Alfons Dehe, Villingen Schwenningen, DE;
Stefan Barzen, Munich, DE;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 31/00 (2006.01); B81B 3/00 (2006.01); H04R 19/00 (2006.01); H04R 1/08 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
H04R 31/003 (2013.01); B81B 3/0021 (2013.01); B81B 3/0086 (2013.01); B81C 1/00158 (2013.01); H04R 1/08 (2013.01); H04R 19/005 (2013.01); H04R 31/006 (2013.01); B81B 2201/0221 (2013.01); B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/04 (2013.01); B81C 2201/013 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS device includes a backplate electrode and a membrane disposed spaced apart from the backplate electrode. The membrane includes a displaceable portion and a fixed portion. The backplate electrode and the membrane are arranged such that an overlapping area of the fixed portion of the membrane with the backplate electrode is less than maximum overlapping.