The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Sep. 10, 2019
Kokusai Electric Corporation, Tokyo, JP;
Satoshi Takano, Toyama, JP;
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
Abstract
There is provided a technique that includes: a reactor including a process chamber where substrate is processed, the reactor being fixed to a vacuum transfer chamber; a substrate mounting stand disposed in the reactor and having substrate mounting surface where the substrate is mounted; a heater heating the substrate; a gas supply part supplying gas into the process chamber; an extraction part extracting basic information for estimating position of the substrate mounting surface; a calculation part calculating estimated position information of center of the substrate mounting surface based on the basic information; a transfer robot disposed in the vacuum transfer chamber and including an end effector supporting the substrate when the substrate is transferred; and a controller performing control to set target coordinate of the end effector according to the estimated position information, move the end effector to the target coordinate, and mount the substrate on the substrate mounting surface.