The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Dec. 06, 2018
Screen Holdings Co., Ltd., Kyoto, JP;
Masashi Furukawa, Kyoto, JP;
SCREEN HOLDINGS CO., LTD., Kyoto, JP;
Abstract
The temperature of a susceptor made of quartz is increased by heat transfer and heat radiation from a heated semiconductor wafer. When the treated semiconductor wafer is transported outwardly, the susceptor has a non-uniform temperature distribution in which a central portion thereof is higher in temperature than an edge portion thereof. In an early stage of preheating in which a new semiconductor wafer is held by the susceptor and starts being irradiated with light emanating from halogen lamps, an intensity ratio that is the ratio of the intensity of light emanating from a central portion of a light irradiator including an array of the halogen lamps to the intensity of light emanating from an edge portion thereof is less than 100%. Thereafter, the ratio of the intensity of light emanating from the central portion of the light irradiator to the intensity of light emanating from the edge portion thereof is increased.