The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Aug. 07, 2018
Applicant:
Futurewei Technologies, Inc., Plano, TX (US);
Inventor:
Francis Man, Lexington, MA (US);
Assignee:
Futurewei Technologies, Inc., Plano, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B81B 7/0058 (2013.01); G02B 26/085 (2013.01); G02B 26/101 (2013.01); B81B 2201/042 (2013.01);
Abstract
A MEMS package includes a cavity formed within a package body, a semiconductor device disposed within the cavity and including a microelectromechanical systems (MEMS) micro-mirror, a damping fluid disposed within the cavity and at least partially surrounding a portion of the MEMS micro-mirror, and a magnet assembly disposed within the cavity and at least partially surrounded by the damping fluid, the magnet assembly being magnetically coupled with the MEMS micro-mirror.