The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2020

Filed:

Apr. 03, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Hsiang Han Hsu, Kanagawa, JP;

Masao Tokunari, Kanagawa, JP;

Koji Masuda, Tokyo, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/42 (2006.01); G02B 6/43 (2006.01); G02B 6/122 (2006.01); G02B 6/12 (2006.01);
U.S. Cl.
CPC ...
G02B 6/4214 (2013.01); G02B 6/43 (2013.01); G02B 6/1221 (2013.01); G02B 6/1228 (2013.01); G02B 2006/12104 (2013.01);
Abstract

A method for forming an embedded mirror structure is disclosed. The method includes preparing a structure that has a substrate and a waveguide layer on the substrate. The waveguide layer includes a core. Also, the waveguide has a top surface and a cavity side surface that defines a cavity opened at the top surface and aligned to the core. The method further includes coating metal particles on the cavity side surface inside the cavity of the waveguide layer to form a metal particle film on the cavity side surface.


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