The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Oct. 13, 2016
Applicant:
Kabushiki Kaisha Nihon Micronics, Musashino-shi, JP;
Inventors:
Tetsuya Yoshioka, Musashino, JP;
Takashi Kawano, Musashino, JP;
Shigeki Makise, Musashino, JP;
Mika Nasu, Musashino, JP;
Assignee:
Kabushiki Kaisha Nihon Micronics, Musashino-shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 1/073 (2006.01); G01R 1/067 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 1/07314 (2013.01); G01R 1/06705 (2013.01); G01R 1/07328 (2013.01); G01R 1/07371 (2013.01); G01R 1/06722 (2013.01); G01R 1/06777 (2013.01); G01R 31/2887 (2013.01);
Abstract
A probe card includes a probe having a spring property and a probe head that holds the probe. The probe head includes a guide portion that holds the probe such that the probe can move in an axis direction Z. The guide portion includes a heat radiation structure that absorbs heat of the probe generated by energization and emits the heat to the outside of the probe.