The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Jun. 12, 2018
Applicant:
Imec Vzw, Leuven, BE;
Inventors:
Assignee:
IMEC VZW, Leuven, BE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 11/02 (2006.01); G01L 13/02 (2006.01);
U.S. Cl.
CPC ...
G01L 11/02 (2013.01); G01L 13/025 (2013.01);
Abstract
A force sensing device comprises: a membrane (), which is configured to deform upon receiving a force; a first Mach Zehnder-type interferometer device (); a second Mach Zehnder-type interferometer device (), wherein a first measurement propagation path () of the first Mach Zehnder-type interferometer device () and a second measurement propagation path () of the second Mach Zehnder-type interferometer device () are arranged on or in the membrane (), and wherein the first measurement propagation path () and the second measurement propagation path () are differently sensitive to applied force on the membrane ().