The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2020

Filed:

Aug. 31, 2016
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Joerg Braeuer, Nehren, DE;

Christian Hoeppner, Stuttgart, DE;

Lars Tebje, Reutlingen, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/5712 (2012.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5712 (2013.01); B81B 3/0032 (2013.01); B81B 7/0016 (2013.01); B81C 1/0019 (2013.01); B81C 1/00333 (2013.01); B81C 1/00484 (2013.01); B81B 2201/025 (2013.01);
Abstract

A method for manufacturing a MEMS element, including the following: forming a least one stationary weight element and at least one moving weight element in the MEMS element, and positioning at least one fixing element at the stationary weight element and at the moving weight element, the fixing element being formed so as to be able to be severed.


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