The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Oct. 11, 2016
Applicant:
Wacker Chemie Ag, Munich, DE;
Inventors:
Heinz Kraus, Zeilarn, DE;
Christian Kutza, Ampfing, DE;
Assignee:
WACKER CHEMIE AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C30B 29/06 (2006.01); C01B 33/035 (2006.01);
U.S. Cl.
CPC ...
C30B 29/06 (2013.01); C01B 33/035 (2013.01);
Abstract
The yield and quality of polysilicon rods produced in the Siemens process are increased by preventing pieces of silicon too large to be removed by flushing with gas from entering reaction gas inlets and offgas outlets by means of protective elements installed in the inlets and/or outlets.