The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Nov. 13, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Mountain View, CA (US);
Sumanth Banda, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 11/04 (2006.01); C25D 5/48 (2006.01); C25D 11/02 (2006.01); C25D 17/00 (2006.01); C25D 3/54 (2006.01);
U.S. Cl.
CPC ...
C25D 11/04 (2013.01); C25D 3/54 (2013.01); C25D 5/48 (2013.01); C25D 11/024 (2013.01); C25D 17/001 (2013.01);
Abstract
A chamber component for a processing chamber comprises an article having impurities, an aluminum coating on a surface of the article, wherein the aluminum coating is substantially free from impurities, and an anodization layer over the aluminum coating. The anodization layer comprises aluminum oxide. The anodization layer further comprises a dense barrier layer portion and a porous columnar layer portion.