The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Jan. 20, 2019
Applicant:
Samsung Display Co., Ltd., Yongin-si, KR;
Inventors:
Assignee:
Samsung Display Co., Ltd., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 37/00 (2006.01); B32B 38/10 (2006.01); B32B 38/00 (2006.01); B32B 37/12 (2006.01); B32B 38/18 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B32B 37/025 (2013.01); B32B 38/0008 (2013.01); B32B 38/10 (2013.01); B32B 2457/20 (2013.01);
Abstract
A method of stably and precisely attaching substrates and an apparatus for stably and precisely attaching substrates, the method including: placing a substrate, attached with a release film, on a shuttle stage; peeling the release film from the substrate; a transferring unit lifting the substrate from the shuttle stage; a gas supplier spraying gas toward the substrate so that the substrate is convexly curved in a direction away from the gas supplier; the substrate transferred into a chamber by the transferring unit; placing the substrate on a main stage in the chamber; and attaching the substrate to an adherend.