The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Jan. 10, 2013
Nakayama Amorphous Co., Ltd., Osaka, JP;
Ryurou Kurahashi, Osaka, JP;
Hiroshi Matsumoto, Osaka, JP;
Junji Takehara, Osaka, JP;
Yoshihisa Fukutome, Osaka, JP;
USUI CO., LTD., Shizuoka, JP;
Abstract
PROBLEM: To provide a large device and a method which is advantageous for forming a large-area amorphous film. SOLUTION: A device of the invention sprays a flame including a particulate material with a spraying machine toward a substrate, melts the material with the flame, and cools the material and flame by cooling gas before they reach the substrate to form an amorphous film. The spraying machine has particulate material spraying ports and flame spraying ports such that the flame including the material has an oblong cross section. Inert gas spraying ports are successively placed on both sides across the ports of the material and flame. Mist spraying ports are successively placed on both sides across the ports for the material, flame and inert gas. A skirt is attached/detached depending on a combustion gas or a film width to restrain film width narrowing and increase of film thickness deviation.