The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2020
Filed:
Nov. 15, 2019
Applicant:
Fujifilm Electronic Materials U.s.a., Inc., North Kingstown, RI (US);
Inventors:
Marcia Cole-Yocom, Scottsdale, AZ (US);
Bryan Hinzie, Gilbert, AZ (US);
Jack Helzer, Chandler, AZ (US);
Yuan Chen, Chandler, AZ (US);
Pejman Ahmadiannamini, Gilbert, AZ (US);
Assignee:
Fujifilm Electronic Materials U.S.A., Inc., North Kingstown, RI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 61/00 (2006.01); B01D 15/00 (2006.01); C07C 45/78 (2006.01); B01D 61/02 (2006.01); B01D 61/08 (2006.01); B01D 15/36 (2006.01); B01D 71/36 (2006.01); B01D 71/56 (2006.01); C07C 67/48 (2006.01); B01D 71/26 (2006.01);
U.S. Cl.
CPC ...
B01D 61/022 (2013.01); B01D 15/361 (2013.01); B01D 61/08 (2013.01); B01D 71/26 (2013.01); B01D 71/36 (2013.01); B01D 71/56 (2013.01); C07C 45/78 (2013.01); C07C 67/48 (2013.01); B01D 2311/25 (2013.01); B01D 2311/2623 (2013.01);
Abstract
The present disclosure is directed to methods of purifying solvents. The purified solvents can be used for cleaning a semiconductor substrate in a multistep semiconductor manufacturing process.