The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Apr. 10, 2019
Applicant:
Xmems Labs, Inc., Los Altos, CA (US);
Inventors:
Assignee:
xMEMS Labs, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 1/32 (2006.01); H04R 17/00 (2006.01); H04R 19/00 (2006.01); H04R 19/02 (2006.01); H04R 9/06 (2006.01); G10K 9/12 (2006.01);
U.S. Cl.
CPC ...
H04R 1/323 (2013.01); G10K 9/12 (2013.01); H04R 17/005 (2013.01); H04R 19/005 (2013.01); H04R 19/02 (2013.01); H04R 9/063 (2013.01);
Abstract
A method for manufacturing an air pulse generating element is provided. First, a thin film layer including a membrane is provided, and then, a plurality of actuators are formed on the thin film layer. After that, a first chamber is formed between the thin film layer and a first plate and followed by patterning the thin film layer to form a plurality of valves, in which the membrane and the valves are formed of the thin film layer. Subsequently, a second chamber is formed between the thin film layer and a second plate, and a plurality of channels are formed in the first plate and the second plate.