The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Jul. 25, 2016
Piezo Studio Inc., Sendai-shi, Miyagi, JP;
Tohoku University, Sendai-shi, Miyagi, JP;
Kenji Inoue, Sendai, JP;
Akira Yoshikawa, Sendai, JP;
Yuji Ohashi, Sendai, JP;
Yuui Yokota, Sendai, JP;
Kei Kamada, Sendai, JP;
Shunsuke Kurosawa, Sendai, JP;
PIEZO STUDIO INC., Miyagi, JP;
TOHOKU UNIVERSITY, Miyagi, JP;
Abstract
To improve the Q value of a piezoelectric thin-film element in a state in which unnecessary vibration is suppressed, an acoustic reflection film () is affixed to a first electrode (), a piezoelectric single-crystal substrate () is thinned by polishing from the other surface () of the piezoelectric single-crystal substrate (), such that the first electrode () and piezoelectric thin film () are piled on the piezoelectric single-crystal substrate (). In this polishing, a pressure (polishing pressure) to the surface () during polishing in an electrode formation region where the first electrode () is formed differs from that in a non-electrode formation region around the electrode formation region. Consequently, the electrode formation region of the piezoelectric thin film (), where the first electrode () is formed, is made thinner than the non-electrode formation region around the electrode formation region.