The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2020

Filed:

Jun. 29, 2017
Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Domenico Giusti, Monza, IT;

Anna Alessandri, Vimercate, IT;

Assignee:

STMICROELECTRONICS S.R.L., Agrate Brianza, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H02N 2/04 (2006.01); B81B 3/00 (2006.01); G02B 26/08 (2006.01); H01G 5/18 (2006.01); H01G 5/38 (2006.01); H01H 57/00 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0953 (2013.01); B81B 3/0018 (2013.01); G02B 26/0833 (2013.01); H01G 5/18 (2013.01); H01G 5/38 (2013.01); H01L 41/094 (2013.01); H01L 41/0946 (2013.01); H02N 2/043 (2013.01); H02N 2/046 (2013.01); H01H 2057/006 (2013.01);
Abstract

A MEMS actuator device of a piezoelectric type formed on a substrate, with a base unit including a base beam element having a main extension in a extension plane and a thickness in a thickness direction perpendicular to the extension plane, smaller than the main extension. A piezoelectric region extends over the beam element. An anchor region is rigid to the base beam element and to the substrate. A base constraint structure is connected to one end of the base beam element and is configured to allow a deformation of the base beam element in the extension plane and substantially reduce a deformation of the base beam element in the thickness direction.


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