The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Dec. 23, 2015
Applicant:
Thales, Courbevoie, FR;
Inventors:
Afshin Ziaei, Vanves, FR;
Matthieu Le Baillif, Orsay, FR;
Paolo Martins, Massy, FR;
Shailendra Bansropun, Paris, FR;
Assignee:
THALES, Courbevoie, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/08 (2006.01); H02N 10/00 (2006.01); H01L 45/00 (2006.01); H01L 41/08 (2006.01); H01H 59/00 (2006.01); B81B 7/00 (2006.01); B81B 3/00 (2006.01); H01G 5/16 (2006.01); H01G 5/18 (2006.01); H01H 57/00 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H01L 41/08 (2013.01); B81B 3/0021 (2013.01); B81B 7/0019 (2013.01); H01G 5/16 (2013.01); H01G 5/18 (2013.01); H01H 57/00 (2013.01); H01H 59/0009 (2013.01); H01L 41/0933 (2013.01); B81B 2201/018 (2013.01); H01H 2057/006 (2013.01);
Abstract
According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.