The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2020

Filed:

Apr. 08, 2019
Applicant:

Vat Holding Ag, Haag, CH;

Inventors:

Florian Ehrne, Fruemsen, CH;

Martin Netzer, Bludenz, AT;

Andreas Hofer, Widnau, CH;

Marco Apolloni, Marbach, CH;

Assignee:

VAT Holding AG, Haag, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); H01L 21/6773 (2013.01); H01L 21/67259 (2013.01); H01L 21/67709 (2013.01); H01L 21/67733 (2013.01); H01L 21/67775 (2013.01); H01L 21/67778 (2013.01); H01L 21/67781 (2013.01);
Abstract

A positioning device, in particular a wafer transportation container positioning device, for positioning a wafer transportation container in a loading and/or unloading position of a loading and/or unloading station which is configured at least for loading and/or unloading wafers from the wafer transportation container. The positioning device, in particular the wafer transportation container positioning device, comprises a positioning mechanism which is configured for contactless positioning of the wafer transportation container in a coupling process between the wafer transportation container and the loading and/or unloading station.


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