The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2020

Filed:

Nov. 26, 2015
Applicant:

Von Ardenne Asset Gmbh & Co. KG, Dresden, DE;

Inventors:

Robert Kuenanz, Dresden, DE;

Jens Melcher, Dresden, DE;

Georg Laimer, Meissen, DE;

Erwin Zschieschang, Dresden, DE;

Bjoern Hornbostel, Dresden, DE;

Christoph Haeusler, Freital, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/673 (2006.01); C23C 14/34 (2006.01); C23C 14/50 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67346 (2013.01); C23C 14/34 (2013.01); C23C 14/50 (2013.01); C23C 16/4585 (2013.01); H01L 21/68707 (2013.01); H01L 21/68735 (2013.01);
Abstract

In accordance with various embodiments, provision is made of a substrate holding device, wherein the latter may comprise a carrier plate with a recess, the recess extending from an upper side of the carrier plate to a lower side of the carrier plate through the carrier plate, a holding frame, which has a frame opening and a support area, surrounding the frame opening, for holding a substrate in the recess, wherein the holding frame inserted into the recess lies on the carrier plate in sections.


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