The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Aug. 11, 2016
Fujikin Incorporated, Osaka, Osaka, JP;
Takeshi Nakamura, Osaka, JP;
Yoshitomo Kanai, Osaka, JP;
FUJIKIN INCORPORATED, Osaka, JP;
Abstract
To provide a flow dividing system that has an improved degree of freedom in arrangement, is suitable for integration, and achieves reductions in the manufacturing costs and maintenance costs. A flow dividing system for controlling, upon dividing a single flow rate into multiple flow rates, the respective flow rates such that the ratio between the divided flow rates matches a preset flow rate ratio. The flow dividing system has: a manifoldfor dividing the single flow rate into the multiple flow rates; and multiple fluid control devicesM,S that are formed as separate bodies from the manifold, are disposed separately from and independently of each other, and respectively control the multiple flow rates. A master deviceM has communication unitM for transmitting a preset flow rate value based on the preset flow rate ratio to a slave deviceS and for receiving a flow rate detection value DQfrom the slave deviceS, and the slave deviceS has a communication unitS for receiving the preset flow rate value from the master deviceM and for transmitting the flow rate detection value DQto the master deviceM.