The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Mar. 21, 2017
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Enri Duqi, Milsno, IT;
Lorenzo Baldo, Bareggio, IT;
Roberto Carminati, Piancogno, IT;
Flavio Francesco Villa, Milsno, IT;
Assignee:
STMicroelectronics S.r.l., Agrate Brianza, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81C 1/00 (2006.01); B81B 7/02 (2006.01); G02B 26/10 (2006.01); H04N 9/31 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B81B 7/02 (2013.01); B81C 1/00158 (2013.01); B81C 1/00182 (2013.01); G02B 26/0841 (2013.01); G02B 26/101 (2013.01); H04N 9/3191 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81C 2201/0116 (2013.01); B81C 2201/0177 (2013.01);
Abstract
A buried cavity is formed in a monolithic body to delimit a suspended membrane. A peripheral insulating region defines a supporting frame in the suspended membrane. Trenches extending through the suspended membrane define a rotatable mobile mass carried by the supporting frame. The mobile mass forms an oscillating mass, supporting arms, spring portions, and mobile electrodes that are combfingered to fixed electrodes of the supporting frame. A reflecting region is formed on top of the oscillating mass.