The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2020

Filed:

Jul. 01, 2016
Applicant:

Politecnico Di Milano, Milan, IT;

Inventors:

Alberto Corigliano, Milan, IT;

Raffaele Ardito, Milan, IT;

Emanuele Bertarelli, Milan, IT;

Marco Ferrera, Milan, IT;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04B 43/04 (2006.01); F04B 43/02 (2006.01); F04B 49/06 (2006.01); F04B 53/10 (2006.01); F04B 45/047 (2006.01); F04B 45/04 (2006.01);
U.S. Cl.
CPC ...
F04B 43/043 (2013.01); F04B 43/025 (2013.01); F04B 49/06 (2013.01); F04B 53/1072 (2013.01); F04B 45/041 (2013.01); F04B 45/047 (2013.01);
Abstract

A micropump includes: a pumping chamber, between a first semiconductor substrate and a second semiconductor substrate bonded to each other; an inlet valve, having an inlet shutter element between an inlet passage and the pumping chamber; an outlet valve, having an outlet shutter element between the pumping chamber and an outlet passage; a first recess for housing the inlet shutter element when the inlet valve is in the open configuration, the first recess and the pumping chamber being fluidly coupled; a second recess for housing the outlet shutter element when the outlet valve is in the open configuration, the second recess and the pumping chamber being fluidly decoupled.


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