The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Mar. 18, 2019
Panasonic Corporation, Osaka, JP;
Kentaro Miyano, Osaka, JP;
Naoto Yanagita, Toyama, JP;
Naoya Ryoki, Osaka, JP;
Takehiro Asahi, Hyogo, JP;
Masaki Nobuoka, Nara, JP;
PANASONIC CORPORATION, Osaka, JP;
Abstract
A ScAlMgOsingle crystal substrate having less collapse of crystal orientation, and a method for producing the single crystal substrate. A ScAlMgOsingle crystal substrate is provided, wherein, when a center of the substrate is designated as coordinates (0,0) and a measurement beam width is set to 1 [mm]×7 [mm] to conduct analysis according to an X-ray diffraction method at respective coordinate positions of (x,0) to (x,0) at an interval of 1 [mm] in an x-axis direction and (0,y) to (0,y) at an interval of 1 mm in a y-axis direction, wherein m and n are each an integer falling within the range so that the measurement beam is not stuck out from the substrate, a worst value of a full width at half maximum of a rocking curve at each of the coordinate positions is less than 20 [sec.].