The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
May. 08, 2019
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventor:
Yasushi Takai, Echizen, JP;
Assignee:
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 4/11 (2016.01); C23C 4/134 (2016.01);
U.S. Cl.
CPC ...
C23C 4/11 (2016.01); C23C 4/134 (2016.01);
Abstract
A spray material is defined as composite particles consisting essentially of (A) particles of rare earth fluoride and (B) particles of rare earth oxide, hydroxide or carbonate, consolidated together. The spray material is plasma sprayed onto a substrate to form a sprayed layer containing rare earth oxyfluoride in a consistent manner while minimizing the process shift and releasing few particles. The sprayed member has improved corrosion resistance to halogen-based gas plasma.