The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2020

Filed:

May. 30, 2018
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Andreas Hartlieb, Stuttgart, DE;

Heiko Stahl, Reutlingen, DE;

Jochen Beintner, Reutlingen, DE;

Juergen Butz, Reutlingen, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C01B 33/02 (2006.01); B81C 1/00 (2006.01); C23C 16/24 (2006.01); H01L 29/16 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C01B 33/02 (2013.01); B81C 1/00666 (2013.01); C23C 16/24 (2013.01); H01L 29/16 (2013.01); C01P 2002/60 (2013.01); C01P 2002/90 (2013.01); C01P 2006/40 (2013.01); H01L 21/0245 (2013.01); H01L 21/02439 (2013.01); H01L 21/02488 (2013.01); H01L 21/02507 (2013.01); H01L 21/02513 (2013.01); H01L 21/02532 (2013.01); H01L 21/02595 (2013.01);
Abstract

A polycrystalline material having low mechanical strain is provided. The polycrystalline material includes one or multiple layers of a first type and one or multiple layers of a second type. The layers of the first type and the layers of the second type each include at least one polycrystalline material component. The layers of the first type have a smaller average crystal grain size than the layers of the second type, a layer of the first type and a layer of the second type being situated, at least in part, one above the other in an alternating sequence, and it being the case for the transition between the layers of the first type and the layers of the second type to be abrupt or continuous.


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