The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Mar. 23, 2018
Origin Company, Limited, Saitama-shi, Saitama, JP;
ORIGIN COMPANY, LIMITED, Saitama-shi, Saitama, JP;
Abstract
To provide a work processing apparatus equipped with a vaporizer that requires no carrier gas and can vaporize a vaporization target liquid having a relatively high flow rate, and a method for manufacturing a processed work. A vaporizerincludes a vaporization partincluding a heat storage bodyhaving a heat capacity higher than that of a vaporization target liquid Fq by a predetermined ratio, and a heat supplierfor supplying heat to the vaporization part. The predetermined ratio is a ratio of heat capacity at which a temperature drop of the heat storage bodyby heat transfer from the heat storage bodyto the liquid Fq flowing through a pathis within a predetermined range, wherein the amount of heat transferred from the heat storage bodyto the liquid Fq is an amount of heat necessary to vaporize the liquid Fq at a planned proportion. A work processing apparatusincludes the vaporizer, a chamber, and a vacuum pumpfor creating a negative pressure in the chamber. The method of manufacturing a processed work includes taking the work W into the chamber, supplying a processing gas Fg generated in the vaporizerinto the chamber, and performing predetermined processing on the work W under an atmosphere of the processing gas Fg in the chamber