The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Mar. 30, 2017
Applicant:
Avago Technologies International Sales Pte. Limited, Singapore, SG;
Inventors:
Takahiko Yanagitani, Tokyo, JP;
Masashi Suzuki, Tokyo, JP;
Assignee:
Avago Technologies International Sales PTE. Limited, Singapore, SG;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/64 (2006.01); C01B 21/072 (2006.01); C23C 14/06 (2006.01); C23C 14/34 (2006.01); H01L 41/187 (2006.01); H01L 41/316 (2013.01); H03H 9/13 (2006.01); H03H 9/145 (2006.01); H03H 9/17 (2006.01); H03H 9/25 (2006.01); H03H 9/56 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02015 (2013.01); C01B 21/072 (2013.01); C23C 14/0617 (2013.01); C23C 14/34 (2013.01); H01L 41/187 (2013.01); H01L 41/316 (2013.01); H03H 9/02031 (2013.01); H03H 9/02543 (2013.01); H03H 9/13 (2013.01); H03H 9/145 (2013.01); H03H 9/175 (2013.01); H03H 9/176 (2013.01); H03H 9/25 (2013.01); H03H 9/562 (2013.01); H03H 9/566 (2013.01); H03H 9/64 (2013.01); C01P 2002/54 (2013.01); C01P 2002/77 (2013.01); C01P 2006/40 (2013.01);
Abstract
A piezoelectric material is described. The piezoelectric material comprises aluminum nitride (AlN) doped with ytterbium (Yb), an atomic percentage of Yb in the AlN being greater than or equal to approximately 10.0% and less than or equal to approximately 27.0%. Piezoelectric layers comprising the piezoelectric material may be used in bulk acoustic wave (BAW) acoustic resonators, and surface acoustic wave (SAW) acoustic resonators. The BAW acoustic resonators and SAW acoustic resonators can be used in a variety of applications.