The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Dec. 19, 2018
Applicant:
Bum Je Woo, Seongnam, KR;
Inventors:
Bum Je Woo, Seongnam, KR;
Young Chul Kim, Yongin, KR;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); B65D 85/48 (2006.01); H01L 21/48 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67389 (2013.01); H01L 21/02041 (2013.01); H01L 21/4817 (2013.01); H01L 21/67017 (2013.01); H01L 21/6732 (2013.01); H01L 21/67383 (2013.01); H01L 21/67386 (2013.01); H01L 21/67393 (2013.01);
Abstract
The present invention relates generally to a wafer storage container, in which purge gas is supplied to a wafer stored in a storage chamber to remove fumes of the wafer or to remove moisture from the wafer, and more particularly, to a wafer storage container, in which it is possible to ensure easy injection of purge gas into a storage chamber and durability of an injection member, and it is possible to easily replace an injection member.
Woo, Bum. (2020). Wafer storage container (U.S. Patent No. 10763149). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10763149
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile