The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2020

Filed:

Nov. 29, 2018
Applicant:

Shanghai Huali Microelectronics Corporation, Shanghai, CN;

Inventors:

Wei Cheng, Shanghai, CN;

Zhonghua Zhu, Shanghai, CN;

Fang Wei, Shanghai, CN;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/398 (2020.01); G06F 119/18 (2020.01); G06F 30/39 (2020.01); H01L 27/02 (2006.01); G03F 1/68 (2012.01); G06F 30/392 (2020.01);
U.S. Cl.
CPC ...
G06F 30/398 (2020.01); G06F 2119/18 (2020.01);
Abstract

The present disclosure provides a pattern density analysis method for analyzing a local pattern density of a layout, the method comprising: obtaining a pattern attribute of each layout pattern located on a layout region to be analyzed; setting, for each layout pattern, a relevant window for the layout pattern based on the corresponding pattern attribute; calculating the pattern density of each relevant window; and selecting the maximum value of the pattern densities of the relevant windows as the maximum local pattern density of the layout, and selecting the minimum value of the pattern densities of the relevant windows as the minimum local pattern density of the layout.


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