The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2020

Filed:

Mar. 16, 2017
Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventor:

Akira Takahashi, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/10 (2006.01); G02B 26/08 (2006.01); G01N 21/64 (2006.01); H01J 37/29 (2006.01); G01S 7/481 (2006.01); H01J 37/28 (2006.01); H01J 37/304 (2006.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/105 (2013.01); G01N 21/6458 (2013.01); G01S 7/4817 (2013.01); G02B 21/0048 (2013.01); G02B 26/08 (2013.01); G02B 26/085 (2013.01); G02B 26/0833 (2013.01); G02B 26/10 (2013.01); H01J 37/28 (2013.01); H01J 37/29 (2013.01); H01J 37/3045 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/1053 (2013.01); H01J 2237/0245 (2013.01); H01J 2237/2482 (2013.01);
Abstract

Provided is a mirror device including a mirror which is supported to be flappable around a fast axis and supported to be flappable around a slow axis and in which a resonance frequency of flapping thereof with respect to the fast axis is a first value and a resonance frequency of the flapping thereof with respect to the slow axis is a second value lower than the first value; a signal extracting portion configured to obtain from a slow axis coil a synthesized signal including an induced signal generated in the slow axis coil due to an operation of flapping the mirror around the fast axis and configured to extract the induced signal from the synthesized signal; and a signal generating portion configured to generates a driving signal so that the flapping of the mirror with respect to the fast axis is in a resonance state according to the induced signal.


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