The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Jan. 15, 2008
Allen J. Bartlett, New London, NH (US);
Michael A. Driscoll, Canton, MA (US);
Michael J. Eacobacci, Jr., South Attleboro, MA (US);
William L. Johnson, Andover, MA (US);
Robert P. Sullivan, Townsend, MA (US);
Sergei Syssoev, North Andover, MA (US);
Mark A. Stira, Wilmington, MA (US);
John J. Casello, Norton, MA (US);
Allen J. Bartlett, New London, NH (US);
Michael A. Driscoll, Canton, MA (US);
Michael J. Eacobacci, Jr., South Attleboro, MA (US);
William L. Johnson, Andover, MA (US);
Robert P. Sullivan, Townsend, MA (US);
Sergei Syssoev, North Andover, MA (US);
Mark A. Stira, Wilmington, MA (US);
John J. Casello, Norton, MA (US);
Edwards Vacuum LLC, Sanborn, NY (US);
Abstract
A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.