logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10760161 B1

PDFFull Text
Date of Patent:
Sep. 01, 2020

Filed:

Dec. 29, 2014

Inject insert for epi chamber

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Shu-Kwan Lau, Sunnyvale, CA (US);

Mehmet Tugrul Samir, Mountain View, CA (US);

Aaron Miller, Sunnyvale, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan, LLP

Primary Examiner:

Karla A Moore

Assistant Examiner:

Tiffany Z Nuckols

Int. Cl.
CPC ...
C23C 16/455 (2006.01); F16L 41/02 (2006.01); C30B 25/14 (2006.01); C30B 31/16 (2006.01); H01J 37/32 (2006.01); C30B 25/16 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4558 (2013.01); C23C 16/45563 (2013.01); C23C 16/45565 (2013.01); C30B 25/14 (2013.01); C30B 25/165 (2013.01); C30B 31/16 (2013.01); H01J 37/3244 (2013.01);
Abstract

Embodiments of the present invention provide a liner assembly including an inject insert. The inject insert enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present invention.

Find Patent Forward Citations

Lau, Shu-Kwan. (2020). Inject insert for epi chamber (U.S. Patent No. 10760161). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10760161

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…