The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Mar. 08, 2019
Toto Ltd., Kitakyushu-shi, Fukuoka, JP;
Junichi Iwasawa, Kitakyushu, JP;
Hiroaki Ashizawa, Kitakyushu, JP;
Takuma Wada, Kitakyushu, JP;
Ryoto Takizawa, Kitakyushu, JP;
Toshihiro Aoshima, Kitakyushu, JP;
Yuuki Takahashi, Kitakyushu, JP;
Atsushi Kinjo, Kitakyushu, JP;
Toto Ltd., Fukuoka, JP;
Abstract
Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.