The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2020
Filed:
Mar. 19, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Eran Weiss, Sunnyvale, CA (US);
Travis Morey, Austin, TX (US);
Nir Merry, Mountain View, CA (US);
Paul B. Reuter, Austin, TX (US);
Izya Kremerman, Los Gatos, CA (US);
Jeffrey C. Hudgens, San Francisco, CA (US);
Dean C. Hruzek, Cedar Park, TX (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.