The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Jun. 30, 2017
Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;
Sung Han, Suwon-si, KR;
Jae Chang Lee, Suwon-si, KR;
Won Han, Suwon-si, KR;
Tae Yoon Kim, Suwon-si, KR;
Jong Woon Kim, Suwon-si, KR;
Tae Kyung Lee, Suwon-si, KR;
Moon Chul Lee, Suwon-si, KR;
Tae Hun Lee, Suwon-si, KR;
Sung Min Cho, Suwon-si, KR;
In Young Kang, Suwon-si, KR;
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Abstract
A bulk acoustic wave resonator device includes: a substrate; a lower electrode disposed on the substrate; a piezoelectric layer disposed over a portion of the lower electrode; an upper electrode disposed on the piezoelectric layer; and a shape control layer covering an edge of a cavity disposed between the substrate and the lower electrode, wherein tensile stress is applied to the shape control layer during formation of the shape control layer.