The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2020

Filed:

Dec. 11, 2018
Applicant:

Anycasting Co., Ltd., Seoul, KR;

Inventors:

Sung Bin Kim, Seoul, KR;

Chan Kyu Park, Seoul, KR;

Kun Woong Ko, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); H01L 51/52 (2006.01); C23F 1/02 (2006.01); C23F 1/28 (2006.01); B23H 3/04 (2006.01); C25F 3/06 (2006.01); C23F 4/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); H01L 51/0014 (2013.01); H01L 51/5203 (2013.01); B23H 3/04 (2013.01); C23F 1/02 (2013.01); C23F 1/28 (2013.01); C23F 4/00 (2013.01); C25F 3/06 (2013.01);
Abstract

Provided is a method of manufacturing an organic deposition mask used in manufacturing of an organic light emitting diode (OLED). More specially, provided is a method of manufacturing an organic deposition mask by which fine deposition openings may be formed on a thin board by electrochemical machining (ECM) using a multi array electrode having projecting electrode parts arrayed thereon. According to an embodiment of the present invention, the method of manufacturing an organic deposition mask including deposition openings formed of first openings facing a deposition source and second openings facing a deposited object, the method may include: forming the first openings on one side of a thin board; and forming the second openings on an opposite side of the thin board by electrochemical machining (ECM) using a second multi array electrode having second projecting electrode parts arrayed thereon so as to communicate with the first openings.


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