The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Nov. 02, 2017
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Tetsuya Isshiki, Shiojiri, JP;
Koichi Morozumi, Shiojiri, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01); H01L 41/04 (2006.01); H01L 41/18 (2006.01); B41J 2/16 (2006.01); H01L 41/187 (2006.01); B41J 2/14 (2006.01); H01L 41/318 (2013.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0805 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1635 (2013.01); B41J 2/1642 (2013.01); B41J 2/1646 (2013.01); H01L 41/042 (2013.01); H01L 41/18 (2013.01); H01L 41/1873 (2013.01); B41J 2/14201 (2013.01); H01L 41/0973 (2013.01); H01L 41/318 (2013.01);
Abstract
A piezoelectric element includes a first electrode; a second electrode; and a piezoelectric layer arranged between the first electrode and the second electrode, in which the piezoelectric layer is a thin film that includes a perovskite-type composite oxide which includes potassium, sodium, and niobium and which is preferentially oriented in the (100) plane, and a crystal structure of the perovskite-type composite oxide includes a basic lattice structure having an oxygen octahedron and a super lattice structure in which the oxygen octahedron is tilted.