The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2020

Filed:

Oct. 12, 2017
Applicant:

Infineon Technologies Ag, Neubiberg, DE;

Inventors:

Jens Schneider, Munich, DE;

Kai Esmark, Neuried, DE;

Martin Wendel, Hohenbrunn, DE;

Assignee:

Infineon Technologies AG, Neubiberg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/02 (2006.01); H01L 29/32 (2006.01); H01L 29/861 (2006.01); H01L 29/866 (2006.01); H01L 29/66 (2006.01); H01L 29/73 (2006.01); H01L 21/265 (2006.01); H01L 21/322 (2006.01); H01L 29/06 (2006.01); H01L 23/62 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0255 (2013.01); H01L 21/26506 (2013.01); H01L 21/3221 (2013.01); H01L 27/0259 (2013.01); H01L 29/0603 (2013.01); H01L 29/32 (2013.01); H01L 29/66113 (2013.01); H01L 29/7302 (2013.01); H01L 29/861 (2013.01); H01L 29/866 (2013.01); H01L 23/62 (2013.01); H01L 2924/0002 (2013.01);
Abstract

The invention relates to an avalanche diode that can be employed as an ESD protection device. An avalanche ignition region is formed at the p-n junction of the diode and includes an enhanced defect concentration level to provide rapid onset of avalanche current. The avalanche ignition region is preferably formed wider than the diode depletion zone, and is preferably created by placement, preferably by ion implantation, of an atomic specie different from that of the principal device structure. The doping concentration of the placed atomic specie should be sufficiently high to ensure substantially immediate onset of avalanche current when the diode breakdown voltage is exceeded. The new atomic specie preferably comprises argon or nitrogen, but other atomic species can be employed. However, other means of increasing a defect concentration level in the diode depletion zone, such as an altered annealing program, are also contemplated.


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