The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2020

Filed:

Sep. 11, 2019
Applicants:

Center for Advanced Soft Electronics, Pohang-si, Gyeongsangbuk-do, KR;

Postech Academy-industry Foundation, Pohang-si, Gyeongsangbuk-do, KR;

Inventors:

Kilwon Cho, Pohang-si, KR;

Min Seok Yoo, Seosan-si, KR;

Hyo Chan Lee, Pohang-si, KR;

Assignees:

Center for Advanced Soft Electronics, Pohang-si, Gyeongsangbuk-do, KR;

Postech Academy-Industry Foundation, Pohang-si, Gyeongsangbuk-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01); H01L 21/285 (2006.01); H01L 21/02 (2006.01); H01L 21/263 (2006.01); H01L 23/532 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28556 (2013.01); H01L 21/0237 (2013.01); H01L 21/02126 (2013.01); H01L 21/02175 (2013.01); H01L 21/02205 (2013.01); H01L 21/2636 (2013.01); H01L 23/53276 (2013.01); H01L 29/1606 (2013.01);
Abstract

Disclosed is a method of manufacturing multilayer graphene, including (a) contacting of a metal substrate with a nonmetal element, (b) reduction through heat treatment, and (c) chemical vapor deposition of a graphene precursor on the metal substrate containing the nonmetal element dissolved therein, thereby manufacturing multilayer graphene that is doped with the nonmetal element on the metal substrate. In the multilayer graphene thus manufactured, the number of graphene layers and the work function are simultaneously adjusted by controlling the concentration of doped nonmetal element in a thickness direction of graphene through interactions related to the reduction of the nonmetal element dissolved in a copper catalyst and the growth of graphene, and moreover, the stacking structure of graphene is maintained and the optoelectronic properties of multilayer graphene can be controlled by simultaneously regulating graphene growth and doping during the synthesis procedure without additional processing.


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