The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Jun. 30, 2016
Shimadzu Corporation, Kyoto, JP;
Kiyonori Koga, Kyoto, JP;
Yuki Komori, Kyoto, JP;
Shimadzu Corporation, Kyoto, JP;
Abstract
A flow controller includes a channel assembly, a pressure sensor, and a pressure control valve. The channel assembly includes a laminated substrate comprised of a plurality of substrates laminated, the laminated substrate having a surface on which a gas inlet and a gas outlet are formed, and having, inside the laminated substrate, a plurality of resistance channels not communicating with one another inside the laminated substrate as internal channels. In the flow controller, the gas inlet and the gas outlet communicate to each other to form a flow rate control channel. The pressure sensor and the pressure control valve are provided on the flow rate control channel. At least one of the resistance channels which is selected to have a desired channel resistance of the flow rate control channel is connected to the flow rate control channel as part of the flow rate control channel.