The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Jun. 28, 2019
Infineon Technologies Ag, Neubiberg, DE;
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Stefan Kolb, Unterschleissheim, DE;
Alfons Dehe, Reutlingen, DE;
Jochen Huber, Wolfach, DE;
Franz Jost, Stuttgart, DE;
Horst Theuss, Wenzenbach, DE;
Wilhelm Wiedmeier, Augsburg, DE;
Juergen Woellenstein, Freiburg, DE;
Infineon Technologies AG, Neubiberg, DE;
Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V., Munich, DE;
Abstract
Shown is a wafer arrangement for a gas sensor including a first substrate and a sescond substrate. The first substrate includes a MEMS membrane associated with a sensor element and an emitter element configured to emit electromagnetic radiation. The second substrate is arranged on top of the first substrate and defines at least a portion of a chamber disposed adjacent to the MEMS membrane.