The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Mar. 11, 2019
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Eric Peter Goodwin, Oro Valley, AZ (US);
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01M 11/02 (2006.01); G01M 11/00 (2006.01); G03F 7/20 (2006.01); G01J 9/02 (2006.01);
U.S. Cl.
CPC ...
G01B 11/2441 (2013.01); G01J 9/02 (2013.01); G01M 11/005 (2013.01); G01M 11/0271 (2013.01); G03F 7/70075 (2013.01); G03F 7/70116 (2013.01); G03F 7/70291 (2013.01); G03F 7/70591 (2013.01);
Abstract
System and method for monitoring of performance of a mirror array of a digital scanner with a use of a lateral shearing interferometer (operated in either static or a phase-shifting condition) to either simply identify problematic pixels for further troubleshooting or measure the exact magnitude of the mirror's deformation.