The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2020
Filed:
Feb. 19, 2019
Applicant:
Fujifilm Electronic Materials U.s.a., Inc., N. Kingstown, RI (US);
Inventors:
Thomas Dory, Gilbert, AZ (US);
Mick Bjelopavlic, Chandler, AZ (US);
Joshua Guske, Mesa, AZ (US);
Kazutaka Takahashi, Gilbert, AZ (US);
Assignee:
Fujifilm Electronic Materials U.S.A., Inc., N. Kingstown, RI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/32 (2006.01); C11D 7/06 (2006.01); H01L 21/02 (2006.01); C11D 7/34 (2006.01); C11D 7/26 (2006.01);
U.S. Cl.
CPC ...
C11D 7/3281 (2013.01); C11D 7/06 (2013.01); C11D 7/261 (2013.01); C11D 7/34 (2013.01); H01L 21/02043 (2013.01);
Abstract
This disclosure relates to a cleaning composition that contains 1) at least one redox agent; 2) at least one alkylsulfonic acid or a salt thereof, the alkylsulfonic acid containing an alkyl group substituted by OH or NH; 3) at least one aminoalcohol; 4) at least one corrosion inhibitor; 5) at least one water soluble organic solvent; 6) water; and 7) optionally, at least one pH adjusting agent.